Cayley Illingworth FRS (11 April 1759, in Nottingham – 23 August 1823, in Scampton) was Archdeacon of Stow from 1808 until his death.

Illingworth was educated at Pembroke College, Cambridge and ordained in 1782. He held livings at Barrow upon Humber, Epworth and Scampton. He received the degree of Doctor of Divinity (DD).

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Church of England titles
Preceded byRobert WhartonArchdeacon of Stow 1808–1823Succeeded byHenry Bayley