List of MEMS foundries
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The list below provides an overview of companies that develop and fabricate MEMS (microelectromechanical systems) devices. These companies are usually referred to the concept of foundries. The offer of the companies varies according to the used material, the production volume and the size of the wafers used for the fabrication. The attribute type is for Integrated Device Manufacturer, Pure-play or Research Institute business model.
| Company | Service | Substrate materials | Production volume | Wafer diameters (in inches) | Type | Headquartered country | |
|---|---|---|---|---|---|---|---|
| Asia Pacific Microsystems, Inc. | MEMS Foundry | Silicon, Sapphire, SOI, Glass, Quartz, Polymer, CMOS-wafers | High volume production | 6 | Pure-play | Taiwan | |
| MEMS, biochip, sensor and photonics manufacturing, including custom design, development, prototyping, and high-volume production | Silicon, SOI, borosilicate, fused silica, quartz, glass, piezo, and engineered substrates | High-volume production | 6, 8 | Pure-play | United States | ||
| MEMS foundry, backend processes, custom microfluidics development, sensor and photonics/optoelectronics, RF/communications, MEMS actuators, metrology, consumable R&D, MedTech CDMO | Si, SOI, E-SOI, glass, borosilicate, quartz, fused silica, FZ Si wafer, and so on | Small to high-volume production | 4, 6, 8 | Pure-play | United States | ||
| Customized MEMS: process, manufacturing, packaging, characterization, failure analysis and reliability. | Silicon, SOI, glass, and CMOS-wafers. | R&D, prototyping and pilot line. | 8 | Research Institute | Canada | ||
| CEA-Leti | Customized MEMS, NEMS, BioMEMS: design, process, manufacturing, characterization, and packaging | Silicon, SOI, glass, and CMOS-wafers. | R&D recurrent batches and pilot line. | 8, 12 | Research Institute | France | |
| CSEM | MEMS design & process development, Lab-to-Fab approach. Focus areas include photonics, microfluidics, watch components, and harsh environments. Lithium niobate and silicon carbide processing are notable technology bricks. | Silicon, SOI, lithium niobate, silicon carbide, fused silica, quartz, glass. | Prototyping, small & medium volume production | 6 | Research Institute | Switzerland | |
| Fraunhofer Institute for Silicon Technology (ISIT) | MEMS design & process development, main Fraunhofer site for post-CMOS, MEMS, electroplating, CMP | Silicon, SOI, glass, GaN and CMOS. | Proof-of-concept, prototyping, small volume production | 8 | Research Institute | Germany | |
| Fraunhofer Institute for Microelectronic Circuits and Systems (IMS) | MEMS design & process development, Fraunhofer focus location for specialized MEMS-processes | Silicon, SOI. | Proof-of-concept, Prototyping, small volume production | 8 | Research Institute | Germany | |
| Hanking Electronics | Class 100 MEMS Foundry Services, MEMS IMUs (6 DoF accelerometers/ gyroscopes), IoT modules and MEMS Design Services. Foundry processes include; Film Deposition, Metal Deposition, Thermal, Wafer Bonding, Etch processes including DRIE and VHF, Wet Processes, and Wafer Level Packaging. | Silicon | High volume production | 8 | IDM | China | |
| IMEC | Low-medium volume MEMS manufacturing (CMOS compatible), incl. custom design, development, post-processing and prototyping | Si, SOI, fused silica or glass; post-processing on CMOS wafers (8-inch to 12-inch ) | Prototyping, low and medium volume production; transfer to foundry for high volume | 8, 12 | Research Institute | Belgium | |
| Customised MEMS design and manufacturing | Silicon and SOI, borosilicate glass or Polymer; structured wafer | Prototyping, low and medium volume production; transfer to foundry for high volume | 6, 8 | Pure-play | Netherlands | ||
| Customized MEMS design, custom process development, prototyping and production. | Silicon, SOI, fused silica, borosilicate glasses, thermally oxidized silicon. | Proof of concept, prototyping, pilot production, small and medium volumes. | 4, 6 | Pure-play | Netherlands | ||
| Mapper | MEMS process development and manufacturing | Silicon, SOI and various glasses, piezoelectric materials | Low volume and prototyping | 4 | Pure-play | Russia | |
| BioMEMS design and manufacturing | Silicon, Glass, SU8/PDMS, Polymer | R&D, Mini volume production | IDM | United States | |||
| Institut für Mikroelektronik Stuttgart (IMS CHIPS) | MEMS design and process development; lab-to-fab approach. Silicon stencil masks for optical applications and device fabrication; Si3N4 membrane masks with patterned Cr absorbers; micromechanical silicon components such as gratings, combs, filters and cogwheels; Cr and quartz patterning processes on 300 mm silicon and quartz wafers; chip alignment and bonding processes with sub-μm post-bond accuracy. | Si, lithium niobate, quartz | Prototyping, small- and medium-volume production | Research institute | Germany | Si, Si3N4, Cr, quartz, CMOS | |
| nanoPHAB | Micro- and Nano-fabrication services, nano-MEMS manufacturing, ASIC | III-V materials, GaAs, InP, Si, Oxi-Nitrides, Glass, Polymers, Multimaterials | Epi-growth, Prototyping and Consultancy. Low to medium volume production. Bridge to high volume. | 2, 3, 4 | Pure-Play | Netherlands | |
| Contracted R&D and manufacturing with extensive experience in processing and integration. Specialize in MEMS, microfluidics, silicon photonics, TSV, CMOS integration, and other emerging technologies. | Silicon, SOI, Glass, flex substrates, polymer, and other materials. | Proof of concept, process development, prototyping, low to mid volume | 2, 3, 4, and 6 | IDM | United States | ||
| NEMS and MEMS Proto Fab (NMPF) | MEMS manufacturing, microfabrication services | Silicon, Glass, Quartz, SOI wafers | Low to medium volume and prototyping | 2, 4 | Pure play | India | |
| Design, prototyping, development and manufacturing of MEMS, photonic, microfluidic and related devices. Also films deposition and individual process steps. | Silicon, SOI, Engineered substrates, ceramic, glass, quartz, Silicon carbide | Low, medium and high volume | 3,4,5,6,8,12 | Pure-play | United States | ||
| Robert Bosch GmbH | Customized MEMS process development and manufacturing. Optional: design, assembly, test, integration | Silicon, SOI, Fused silica or glass, post-processing on 200mm-CMOS wafers | Prototyping, development, medium and high volume | 8 | IDM | Germany | |
| Safran Sensing Technologies | MEMS Manufacturing | Silicon, SOI | Medium volume production | 6 | IDM | Switzerland Norway | |
| Science Foundry | MEMS process development for prototype and volume production; Standard Technologies MPWs | Silicon, SOI, glass, quartz, polymer | Prototyping and volume production | 6 | Pure-play | United States | |
| Semefab | MEMS manufacturing | High volume production | 4, 6 | Pure-play | United Kingdom | ||
| Semi-Conductor Laboratory | CMOS & MEMS design, manufacturing and packaging; microfabrication | Silicon, SOI and various glasses | From Low volume production | 6,8 | Research Institute | India | |
| Silex Microsystems | MEMS process development and manufacturing. Photolithography, etching, deposition and oxidation, bonding and glass packaging. | Silicon | Prototyping and high volume production | 8 | Pure-play | Sweden China | |
| MEMS process development and production | Silicon | Prototype fabrications through to mass production | 8 | IDM | United Kingdom Japan | ||
| SINTEF MiNaLab | Customized MEMS, BioMEMS, piezoMEMS and Micro-optics. Modeling and design, process development, testing and characterization. | Silicon, SOI, Glass | Prototyping, low and medium volume production; transfer to foundry for high volume | 6 | Research Institute | Norway | |
| Sony Semiconductor | MEMS development and manufacturing | Silicon, SOI | Prototyping and high volume production | 6, 8 | IDM | Japan | |
| STMicroelectronics | MEMS (including accelerometers, gyroscopes, digital compasses, inertial modules, pressure sensors, humidity sensors and microphones) | Silicon | High volume production | IDM | Switzerland | ||
| Teledyne DALSA | MEMS design and manufacturing with integration of individual foundry processes | Silicon and polysilicon | High volume production | 6, 8 | Pure-play | Canada | |
| Teledyne Micralyne | MEMS design, manufacturing and packaging; microfabrication | Silicon, SOI and various glasses | From scale-up to high volume production | 6 | Pure-play | Canada | |
| Tower Semiconductor | IC manufacturing | Silicon | High volume production | 6, 8 | Pure-play | Israel | |
| TDK Tronics | MEMS design and manufacturing | Silicon, SOI and glass wafer | Prototyping, low and high volume production | 6 | Pure-play | France Japan | |
| TSMC | MEMS design and manufacturing | Silicon | High volume production | 6, 8, 12 | Pure-play | Taiwan | |
| uFluidix | MEMS and Microfluidics manufacturing | Silicon, glass, PDMS | Low-Medium volume production | Pure-play | Canada | ||
| United Microelectronics Corporation | MEMS manufacturing | Silicon | High volume production | 8 | Pure-play | Taiwan | |
| Wunderlichips | Focus on PDMS devices, process development | Silicon, SU8\PDMS | R&D, low volume | 4, 6, 8 | Pure-play | Switzerland | |
| X-Fab | MEMS design and manufacturing | Silicon and glass | High volume production | 6, 8 | Pure-play | Germany | |
| Customized thin film and MEMS process development and manufacturing, certified for medical devices | Silicon, SOI, glass, quartz and CMOS-wafers | Prototyping, low and medium volume production | 8 | Pure-play | Netherlands | ||
| Full-system MEMS (inertial sensors, micro mirrors, ultrasound transducers, microphones, pressure sensors, gas and mass sensors) design, manufacturing, and packaging. Micro fabrication services. | Silicon, SOI, glass, polymer | Proof of concept, prototyping, small volume production, transfer to partner foundries for high-volume production. | 3, 4, 6, 8 | Pure-play | Belgium |